Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system

A focused ion beam system was used to prepare site specific transmission electron microscopy plan view specimens. A new technique was used for this purpose. It consisted of milling a wedge shaped piece of material, lifting it out using needle and micromanipulator, and orientating it on the substrate...

সম্পূর্ণ বিবরণ

গ্রন্থ-পঞ্জীর বিবরন
প্রধান লেখক: Langford, R, Huang, Y, Lozano-Perez, S, Titchmarsh, J
বিন্যাস: Journal article
ভাষা:English
প্রকাশিত: 2001
বিবরন
সংক্ষিপ্ত:A focused ion beam system was used to prepare site specific transmission electron microscopy plan view specimens. A new technique was used for this purpose. It consisted of milling a wedge shaped piece of material, lifting it out using needle and micromanipulator, and orientating it on the substrate with the original surface vertical. Based on the lift-out technique for the preparation of a cross-section specimen, the plane-view specimen was then milled from this piece of material.