Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system

Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system

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A focused ion beam system was used to prepare site specific transmission electron microscopy plan view specimens. A new technique was used for this purpose. It consisted of milling a wedge shaped piece of material, lifting it out using needle and micromanipulator, and orientating it on the substrate...

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Bibliografiske detaljer
Main Authors:	Langford, R, Huang, Y, Lozano-Perez, S, Titchmarsh, J
Format:	Journal article
Sprog:	English
Udgivet:	2001

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