Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system

A focused ion beam system was used to prepare site specific transmission electron microscopy plan view specimens. A new technique was used for this purpose. It consisted of milling a wedge shaped piece of material, lifting it out using needle and micromanipulator, and orientating it on the substrate...

詳細記述

書誌詳細
主要な著者: Langford, R, Huang, Y, Lozano-Perez, S, Titchmarsh, J
フォーマット: Journal article
言語:English
出版事項: 2001