Toogood, M., Toogood, M. J., & Hancock, G. (1991). Studies of the chemistry of plasmas used for semiconductor etching.
Chicago Style (17th ed.) CitationToogood, M., M. J. Toogood, and G. Hancock. Studies of the Chemistry of Plasmas Used for Semiconductor Etching. 1991.
MLA citiranjeToogood, M., et al. Studies of the Chemistry of Plasmas Used for Semiconductor Etching. 1991.
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