Dyfyniad APA

Borucki, L., Witelski, T., Please, C., Kramer, P., & Schwendeman, D. (2004). A theory of pad conditioning for chemical-mechanical polishing.

Dyfyniad Arddull Chicago

Borucki, L., T. Witelski, C. Please, P. Kramer, and D. Schwendeman. A Theory of Pad Conditioning for Chemical-mechanical Polishing. 2004.

Dyfyniad MLA

Borucki, L., et al. A Theory of Pad Conditioning for Chemical-mechanical Polishing. 2004.

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