Borucki, L., Witelski, T., Please, C., Kramer, P., & Schwendeman, D. (2004). A theory of pad conditioning for chemical-mechanical polishing.
Cita Chicago (17th ed.)Borucki, L., T. Witelski, C. Please, P. Kramer, i D. Schwendeman. A Theory of Pad Conditioning for Chemical-mechanical Polishing. 2004.
Cita MLA (9th ed.)Borucki, L., et al. A Theory of Pad Conditioning for Chemical-mechanical Polishing. 2004.
Atenció: Aquestes cites poden no estar 100% correctes.