APA (7th ed.) Citation

Borucki, L., Witelski, T., Please, C., Kramer, P., & Schwendeman, D. (2004). A theory of pad conditioning for chemical-mechanical polishing.

Chicago Style (17th ed.) Citation

Borucki, L., T. Witelski, C. Please, P. Kramer, and D. Schwendeman. A Theory of Pad Conditioning for Chemical-mechanical Polishing. 2004.

MLA (9th ed.) Citation

Borucki, L., et al. A Theory of Pad Conditioning for Chemical-mechanical Polishing. 2004.