Borucki, L., Witelski, T., Please, C., Kramer, P., & Schwendeman, D. (2004). A theory of pad conditioning for chemical-mechanical polishing.
Chicagoスタイル(17版)引用形式Borucki, L., T. Witelski, C. Please, P. Kramer, , D. Schwendeman. A Theory of Pad Conditioning for Chemical-mechanical Polishing. 2004.
MLA(9版)引用形式Borucki, L., et al. A Theory of Pad Conditioning for Chemical-mechanical Polishing. 2004.
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