Exceeding conventional resolution limits in high-resolution transmission electron microscopy using tilted illumination and exit-wave restoration.
Tilted illumination exit-wave restoration is compared for two aberration-corrected instruments at different accelerating voltages. The experimental progress of this technique is also reviewed and the significance of off-axial aberrations examined. Finally, the importance of higher order aberration c...
| Main Authors: | , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2010
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