DECONVOLUTION METHOD TO OBTAIN COMPOSITION PROFILES FROM SEM BACKSCATTERED ELECTRON SIGNAL PROFILES FOR BULK SPECIMENS
Compositional profiles across CdTe/Cd(y)Hg(1-y)Te interfaces in bulk specimens have been determined from backscattered electron (BSE) atomic-number contrast line profiles obtained using the scanning electron microscope. To improve the spatial resolution in the interface region, a numerical deconvolu...
Main Authors: | , , |
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Format: | Journal article |
Language: | English |
Published: |
Elsevier
1994
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