DECONVOLUTION METHOD TO OBTAIN COMPOSITION PROFILES FROM SEM BACKSCATTERED ELECTRON SIGNAL PROFILES FOR BULK SPECIMENS

Compositional profiles across CdTe/Cd(y)Hg(1-y)Te interfaces in bulk specimens have been determined from backscattered electron (BSE) atomic-number contrast line profiles obtained using the scanning electron microscope. To improve the spatial resolution in the interface region, a numerical deconvolu...

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Main Authors: Konkol, A, Wilshaw, P, Booker, G
格式: Journal article
语言:English
出版: Elsevier 1994