APPLICATION OF TRANSMISSION ION CHANNELING TO THE IMAGING OF STACKING-FAULTS
The Nuclear Microprobe at the University of Oxford has been employed to produce images of crystal defects using transmission ion channeling This paper describes the experimental set-up for the technique and shows how images of stacking faults near the surface of a 40 mu m thick silicon crystal can b...
| Main Authors: | , , , |
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| Format: | Conference item |
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1995
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