APPLICATION OF TRANSMISSION ION CHANNELING TO THE IMAGING OF STACKING-FAULTS

The Nuclear Microprobe at the University of Oxford has been employed to produce images of crystal defects using transmission ion channeling This paper describes the experimental set-up for the technique and shows how images of stacking faults near the surface of a 40 mu m thick silicon crystal can b...

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Main Authors: King, P, Breese, M, Wilshaw, P, Grime, G
Format: Conference item
Published: 1995
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author King, P
Breese, M
Wilshaw, P
Grime, G
author_facet King, P
Breese, M
Wilshaw, P
Grime, G
author_sort King, P
collection OXFORD
description The Nuclear Microprobe at the University of Oxford has been employed to produce images of crystal defects using transmission ion channeling This paper describes the experimental set-up for the technique and shows how images of stacking faults near the surface of a 40 mu m thick silicon crystal can be generated, The invisibility of faults for certain planar channeling directions produces information on the nature of these defects. For the faults that are visible, the choice of channeling direction affects the image contrast. It is estimated that faults at least 10 mu m below the surface of the sample would be detectable for the analysing beam of 3 MeV protons.
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spelling oxford-uuid:e9143e1f-c943-4bba-bb7d-b76ab44a24ea2022-03-27T10:51:36ZAPPLICATION OF TRANSMISSION ION CHANNELING TO THE IMAGING OF STACKING-FAULTSConference itemhttp://purl.org/coar/resource_type/c_5794uuid:e9143e1f-c943-4bba-bb7d-b76ab44a24eaSymplectic Elements at Oxford1995King, PBreese, MWilshaw, PGrime, GThe Nuclear Microprobe at the University of Oxford has been employed to produce images of crystal defects using transmission ion channeling This paper describes the experimental set-up for the technique and shows how images of stacking faults near the surface of a 40 mu m thick silicon crystal can be generated, The invisibility of faults for certain planar channeling directions produces information on the nature of these defects. For the faults that are visible, the choice of channeling direction affects the image contrast. It is estimated that faults at least 10 mu m below the surface of the sample would be detectable for the analysing beam of 3 MeV protons.
spellingShingle King, P
Breese, M
Wilshaw, P
Grime, G
APPLICATION OF TRANSMISSION ION CHANNELING TO THE IMAGING OF STACKING-FAULTS
title APPLICATION OF TRANSMISSION ION CHANNELING TO THE IMAGING OF STACKING-FAULTS
title_full APPLICATION OF TRANSMISSION ION CHANNELING TO THE IMAGING OF STACKING-FAULTS
title_fullStr APPLICATION OF TRANSMISSION ION CHANNELING TO THE IMAGING OF STACKING-FAULTS
title_full_unstemmed APPLICATION OF TRANSMISSION ION CHANNELING TO THE IMAGING OF STACKING-FAULTS
title_short APPLICATION OF TRANSMISSION ION CHANNELING TO THE IMAGING OF STACKING-FAULTS
title_sort application of transmission ion channeling to the imaging of stacking faults
work_keys_str_mv AT kingp applicationoftransmissionionchannelingtotheimagingofstackingfaults
AT breesem applicationoftransmissionionchannelingtotheimagingofstackingfaults
AT wilshawp applicationoftransmissionionchannelingtotheimagingofstackingfaults
AT grimeg applicationoftransmissionionchannelingtotheimagingofstackingfaults