APPLICATION OF TRANSMISSION ION CHANNELING TO THE IMAGING OF STACKING-FAULTS

The Nuclear Microprobe at the University of Oxford has been employed to produce images of crystal defects using transmission ion channeling This paper describes the experimental set-up for the technique and shows how images of stacking faults near the surface of a 40 mu m thick silicon crystal can b...

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Main Authors: King, P, Breese, M, Wilshaw, P, Grime, G
Format: Conference item
Izdano: 1995

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