Roll-to-roll patterning of Al/Cu/Ag electrodes on flexible polyethylene by oil masking: A comparison of thermal evaporation and magnetron sputtering
Here we show in-line-patterning of Al (37 nm)/Cu (58 nm)/Ag (55 nm) electrodes on flexible poly(ethylene-terephthalate) at 1–25 m min−1, using a flexography printing apparatus retrofitted to a commercial roll-to-roll vapor deposition system. A Krytox® 1506 lift-off mask was printed for simultaneous...
| Үндсэн зохиолчид: | , , , |
|---|---|
| Формат: | Journal article |
| Хэл сонгох: | English |
| Хэвлэсэн: |
Elsevier
2019
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