ATOM-PROBE FIELD-ION MICROSCOPE STUDIES OF PALLADIUM SILICIDE ON SILICON

ATOM-PROBE FIELD-ION MICROSCOPE STUDIES OF PALLADIUM SILICIDE ON SILICON

Palladium silicide coated silicon specimens have been formed by thermally evaporating palladium onto clean field evaporated n-type silicon (100) tips. The thin palladium overlayer is reacted to form palladium silicide by thermal annealing at 675 K. The tips were studied by field ion imaging, pulsed...

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Bibliografiska uppgifter
Huvudupphovsmän:	King, R, Mackenzie, R, Smith, G, Cade, N
Materialtyp:	Conference item
Publicerad:	1995

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