THE GROWTH OF NUCLEATION LAYERS FOR HIGH-QUALITY DIAMOND CVD FROM AN RF PLASMA
Capacitively coupled radio frequency (cc-RF) plasmas offer significant advantages over microwave-induced plasmas for the growth of large-area homogeneous thin films. However, conventionally designed cc-RF sources lead, at best, to extremely poor-quality material when diamond growth is attempted. The...
| প্রধান লেখক: | , , |
|---|---|
| বিন্যাস: | Conference item |
| প্রকাশিত: |
1995
|