THE GROWTH OF NUCLEATION LAYERS FOR HIGH-QUALITY DIAMOND CVD FROM AN RF PLASMA
Capacitively coupled radio frequency (cc-RF) plasmas offer significant advantages over microwave-induced plasmas for the growth of large-area homogeneous thin films. However, conventionally designed cc-RF sources lead, at best, to extremely poor-quality material when diamond growth is attempted. The...
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| Format: | Conference item |
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1995
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