Structural modelling of nano-amorphous Si-O-N films in silicon nitride ceramics
In order to obtain a detailed computational description of the structure and fundamental properties of silicon oxynitride films as thin as 1mn in Si3N4 ceramics, a reliable and transferable many-body inter-atomic potential has been developed for Si-N-O systems and used to perform molecular dynamic (...
| Main Authors: | , , , , , |
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| Format: | Conference item |
| Published: |
2004
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