Dopant incorporation mechanisms during the growth of thin film diamond
The reactions of boron trichloride and a trimethylamine borane complex have been studied on polycrystalline diamond surfaces. BCl3 is seen to reversibly adsorb with no thermal route for the formation of atomic boron on the diamond surface being apparent; it does, however, have an appreciable surface...
| Main Authors: | , , , |
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| Format: | Conference item |
| Published: |
1996
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