Chromatic Confocal Electron Microscopy with a Finite Pinhole Size
Scanning confocal electron microscopy (SCEM) is a new imaging mode in electron microscopy. Spherical aberration corrected electron microscope instruments fitted with two aberration correctors can be used in this mode which provides improved depth resolution and selectivity compared to optical sectio...
| Main Authors: | , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2012
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