Improvements in the mass resolution of the three-dimensional atom probe
A new three-dimensional atom probe has been developed, in which energy compensation has been included in order to improve the mass resolution of the technique. A first order reflectron is used as its energy compensating device. The incorporation of a reflectron in a three-dimensional atom probe is l...
Main Authors: | , , , |
---|---|
Format: | Conference item |
Published: |
1996
|