Infrared single wavelength gas composition monitoring for metalorganic vapour-phase epitaxy
We discuss the use of fixed wavelength infrared absorption measurements as a means for observing compositional changes in MOVPE process gas mixtures using relatively simple instrumentation consisting of an incandescent lamp, a narrow bandpass filter matched to the CH stretch modes of the alkyl precu...
| Main Authors: | , , , , , , , |
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| Format: | Conference item |
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Elsevier
2000
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