Enhanced catalytic palladium embedded inside porous silicon for improved hydrogen gas sensing
In this work, we reported on room temperature porous silicon (PS) and embedding PS using simple and economical techniques of electrochemical etching and thermal evaporation. The PS substrate was prepared using the technique of electrochemically etching the n-type Si (100) wafer at a constant current...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
Penerbit Universiti Kebangsaan Malaysia
2022
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Online Access: | http://journalarticle.ukm.my/21209/1/SDB%2017.pdf |