Aluminium-induced crystallization of silicon thin film by excimer laser annealing
Polycrystalline silicon (poly-Si) film was fabricated by indirect process of re-crystallization of amorphous silicon (a-Si) thin film. This enhancement process is important to determine the performance of silicon thin film (STF). In this attempt, a fundamental study was carried out to enhance the cr...
| Κύριοι συγγραφείς: | , |
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| Μορφή: | Άρθρο |
| Γλώσσα: | English |
| Έκδοση: |
Universiti Kebangsaan Malaysia
2013
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| Διαθέσιμο Online: | http://journalarticle.ukm.my/5907/1/15%2520Siti%2520Noraiza.pdf |