Aluminium-induced crystallization of silicon thin film by excimer laser annealing
Polycrystalline silicon (poly-Si) film was fabricated by indirect process of re-crystallization of amorphous silicon (a-Si) thin film. This enhancement process is important to determine the performance of silicon thin film (STF). In this attempt, a fundamental study was carried out to enhance the cr...
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Format: | Article |
Language: | English |
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Universiti Kebangsaan Malaysia
2013
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Online Access: | http://journalarticle.ukm.my/5907/1/15%2520Siti%2520Noraiza.pdf |
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author | Siti Noraiza Ab Razak, Noriah Bidin, |
author_facet | Siti Noraiza Ab Razak, Noriah Bidin, |
author_sort | Siti Noraiza Ab Razak, |
collection | UKM |
description | Polycrystalline silicon (poly-Si) film was fabricated by indirect process of re-crystallization of amorphous silicon (a-Si) thin film. This enhancement process is important to determine the performance of silicon thin film (STF). In this attempt, a fundamental study was carried out to enhance the crystallization of aluminium doped silicon thin film. An a-Si thin film was prepared by low pressure physical vapour deposition (PVD) and doped with 10% aluminium. The aluminium-induced crystallization (AIC) process was carried out in two sequence steps. Firstly, the amorphous film was annealed by using conventional heat treatment at operating temperature of 350°C. Secondly, the poly-Si underwent excimer laser anneling (ELA). The microstructure of thin film was analyzed using atomic force microscope (AFM). The results showed that, the grain size of the a-Si film is increased with the energy density of the excimer laser. The optimum grain size obtained is 129 nm corresponding to energy density of 356 mJ cm-2. |
first_indexed | 2024-03-06T03:58:59Z |
format | Article |
id | ukm.eprints-5907 |
institution | Universiti Kebangsaan Malaysia |
language | English |
last_indexed | 2024-03-06T03:58:59Z |
publishDate | 2013 |
publisher | Universiti Kebangsaan Malaysia |
record_format | dspace |
spelling | ukm.eprints-59072016-12-14T06:39:49Z http://journalarticle.ukm.my/5907/ Aluminium-induced crystallization of silicon thin film by excimer laser annealing Siti Noraiza Ab Razak, Noriah Bidin, Polycrystalline silicon (poly-Si) film was fabricated by indirect process of re-crystallization of amorphous silicon (a-Si) thin film. This enhancement process is important to determine the performance of silicon thin film (STF). In this attempt, a fundamental study was carried out to enhance the crystallization of aluminium doped silicon thin film. An a-Si thin film was prepared by low pressure physical vapour deposition (PVD) and doped with 10% aluminium. The aluminium-induced crystallization (AIC) process was carried out in two sequence steps. Firstly, the amorphous film was annealed by using conventional heat treatment at operating temperature of 350°C. Secondly, the poly-Si underwent excimer laser anneling (ELA). The microstructure of thin film was analyzed using atomic force microscope (AFM). The results showed that, the grain size of the a-Si film is increased with the energy density of the excimer laser. The optimum grain size obtained is 129 nm corresponding to energy density of 356 mJ cm-2. Universiti Kebangsaan Malaysia 2013-02 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/5907/1/15%2520Siti%2520Noraiza.pdf Siti Noraiza Ab Razak, and Noriah Bidin, (2013) Aluminium-induced crystallization of silicon thin film by excimer laser annealing. Sains Malaysiana, 42 (2). pp. 219-222. ISSN 0126-6039 http://www.ukm.my/jsm/ |
spellingShingle | Siti Noraiza Ab Razak, Noriah Bidin, Aluminium-induced crystallization of silicon thin film by excimer laser annealing |
title | Aluminium-induced crystallization of silicon thin film by excimer laser annealing |
title_full | Aluminium-induced crystallization of silicon thin film by excimer laser annealing |
title_fullStr | Aluminium-induced crystallization of silicon thin film by excimer laser annealing |
title_full_unstemmed | Aluminium-induced crystallization of silicon thin film by excimer laser annealing |
title_short | Aluminium-induced crystallization of silicon thin film by excimer laser annealing |
title_sort | aluminium induced crystallization of silicon thin film by excimer laser annealing |
url | http://journalarticle.ukm.my/5907/1/15%2520Siti%2520Noraiza.pdf |
work_keys_str_mv | AT sitinoraizaabrazak aluminiuminducedcrystallizationofsiliconthinfilmbyexcimerlaserannealing AT noriahbidin aluminiuminducedcrystallizationofsiliconthinfilmbyexcimerlaserannealing |