Optimized scratch adhesion for TiSiN coatings deposited by a combination of DC and RF sputtering
This paper outlines an experimental study of the TiSiN coatings deposited using a combination of direct current (DC) and radio frequency (RF) PVD magnetron sputtering (DR-PVD) on high speed steel (HSS) substrates. An L9 Taguchi orthogonal array was used to conduct the experiments for finding the opt...
| Κύριοι συγγραφείς: | , , , |
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| Μορφή: | Άρθρο |
| Έκδοση: |
Elsevier
2011
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