Electrical Characteristics of Oxidized/Nitrided Zr Thin Film on Si
In this work, electrical properties of simultaneously oxidized and nitrided sputtered Zr thin film on n-type Si via N2O gas were systematically investigated and charge conduction mechanisms through the oxide were quantitatively analyzed. Effects of simultaneous oxidation and nitridation duration on...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Published: |
Electrochemical Society
2011
|
| Subjects: |