Physical and dispersive optical characteristics of ZrON/Si thin-film system
To date, the complex evaluation of physical and dispersive optical characteristics of the ZrON/Si film system has yet been reported. Hence, ZrON thin films have been formed on Si(100) substrates through oxidation/nitridation of sputtered metallic Zr in N2O environment at 500, 700, and 900 ∘C. Physic...
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| Format: | Article |
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Springer
2014
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