Structural ordering, morphology and optical properties of amorphous AlxIn1-xN thin films grown by plasma-assisted dual source reactive evaporation
Amorphous aluminum indium nitride (AlxIn1-xN) thin films were deposited on quartz substrates by plasma-assisted dual source reactive evaporation system. In-rich (x = 0.10 and 0.18) and Al-rich (x = 0.60 and 0.64) films were prepared by simply varying an AC voltage applied to indium wire. The X-ray-d...
| Main Authors: | , , , , , , |
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| Format: | Article |
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Elsevier
2015
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| Subjects: |