Design and analysis of MEMS high sensitive capacitive pressure sensor
In this study, MEMS high sensitive capacitive pressure sensor based on poly-silicon diaphragm have been designed and analysed by using COMSOL Multiphysics Software. Three sensor designs: clamped, 8 slotted and 4 slotted with and without Teflon (polytetrafluoroethylene) coating were tested and compar...
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| Format: | Article |
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Medwell Journals
2016
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