Design and analysis of MEMS high sensitive capacitive pressure sensor
In this study, MEMS high sensitive capacitive pressure sensor based on poly-silicon diaphragm have been designed and analysed by using COMSOL Multiphysics Software. Three sensor designs: clamped, 8 slotted and 4 slotted with and without Teflon (polytetrafluoroethylene) coating were tested and compar...
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| Format: | Article |
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Medwell Journals
2016
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| _version_ | 1796960452590174208 |
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| author | Ali, M. Soin, N. Noorakma, A.C.W. Yusof, N. Hatta, S.F.W.M. |
| author_facet | Ali, M. Soin, N. Noorakma, A.C.W. Yusof, N. Hatta, S.F.W.M. |
| author_sort | Ali, M. |
| collection | UM |
| description | In this study, MEMS high sensitive capacitive pressure sensor based on poly-silicon diaphragm have been designed and analysed by using COMSOL Multiphysics Software. Three sensor designs: clamped, 8 slotted and 4 slotted with and without Teflon (polytetrafluoroethylene) coating were tested and compared to understand the sensitivity and deflection of the sensors. The pressure sensor was designed to evaluate the pressure in ranges of 0-60 mmHg which is in the range of Intraocular Pressure (IOP) for glaucoma. The capacitive pressure sensor is design using different structures of the diaphragm and it is identified that 4 slotted square diaphragms gives the highest sensitivities amongst the presented design. By coating the diaphragm and adding slots into the diaphragm, the displacement improves while mechanical and capacitance sensitivities increase. |
| first_indexed | 2024-03-06T05:44:49Z |
| format | Article |
| id | um.eprints-18230 |
| institution | Universiti Malaya |
| last_indexed | 2024-03-06T05:44:49Z |
| publishDate | 2016 |
| publisher | Medwell Journals |
| record_format | dspace |
| spelling | um.eprints-182302017-11-13T01:38:34Z http://eprints.um.edu.my/18230/ Design and analysis of MEMS high sensitive capacitive pressure sensor Ali, M. Soin, N. Noorakma, A.C.W. Yusof, N. Hatta, S.F.W.M. TA Engineering (General). Civil engineering (General) TK Electrical engineering. Electronics Nuclear engineering In this study, MEMS high sensitive capacitive pressure sensor based on poly-silicon diaphragm have been designed and analysed by using COMSOL Multiphysics Software. Three sensor designs: clamped, 8 slotted and 4 slotted with and without Teflon (polytetrafluoroethylene) coating were tested and compared to understand the sensitivity and deflection of the sensors. The pressure sensor was designed to evaluate the pressure in ranges of 0-60 mmHg which is in the range of Intraocular Pressure (IOP) for glaucoma. The capacitive pressure sensor is design using different structures of the diaphragm and it is identified that 4 slotted square diaphragms gives the highest sensitivities amongst the presented design. By coating the diaphragm and adding slots into the diaphragm, the displacement improves while mechanical and capacitance sensitivities increase. Medwell Journals 2016 Article PeerReviewed Ali, M. and Soin, N. and Noorakma, A.C.W. and Yusof, N. and Hatta, S.F.W.M. (2016) Design and analysis of MEMS high sensitive capacitive pressure sensor. Journal of Engineering and Applied Sciences, 11 (12). pp. 2688-2692. ISSN 1816-949X, DOI https://doi.org/10.3923/jeasci.2016.2688.2692 <https://doi.org/10.3923/jeasci.2016.2688.2692>. http://medwelljournals.com/abstract/?doi=jeasci.2016.2688.2692 doi: 10.3923/jeasci.2016.2688.2692 |
| spellingShingle | TA Engineering (General). Civil engineering (General) TK Electrical engineering. Electronics Nuclear engineering Ali, M. Soin, N. Noorakma, A.C.W. Yusof, N. Hatta, S.F.W.M. Design and analysis of MEMS high sensitive capacitive pressure sensor |
| title | Design and analysis of MEMS high sensitive capacitive pressure sensor |
| title_full | Design and analysis of MEMS high sensitive capacitive pressure sensor |
| title_fullStr | Design and analysis of MEMS high sensitive capacitive pressure sensor |
| title_full_unstemmed | Design and analysis of MEMS high sensitive capacitive pressure sensor |
| title_short | Design and analysis of MEMS high sensitive capacitive pressure sensor |
| title_sort | design and analysis of mems high sensitive capacitive pressure sensor |
| topic | TA Engineering (General). Civil engineering (General) TK Electrical engineering. Electronics Nuclear engineering |
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