Nanostructured Diamond-Like Carbon Films Grown by Off-Axis Pulsed Laser Deposition

Nanostructured diamond-like carbon (DLC) films instead of the ultrasmooth film were obtained by pulsed laser ablation of pyrolytic graphite. Deposition was performed at room temperature in vacuum with substrates placed at off-axis position. The configuration utilized high density plasma plume arrivi...

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Bibliographic Details
Main Authors: Yap, S.S., Nee, C.H., Yap, S.L., Tou, T.Y.
Format: Article
Published: Hindawi Publishing Corporation 2015
Subjects: