Impact of a Strained Periodic Multilayer on the Surface and Crystal Quality of a Semipolar (11–22) GaN Template
Efficient reduction of defects and dislocations in a semipolar (11-22) GaN epilayer with the use of an AlN/GaN strained periodic multilayer is demonstrated. On- A nd off-axis X-ray rocking curve analyses have shown significant improvement in the crystalline qualities with remarkable narrowing in the...
| Main Authors: | , , , , , |
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| Format: | Article |
| Published: |
American Chemical Society
2019
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| Subjects: |