Thermal stability of electrodeposited LIGA Ni-W alloys for high temperature MEMS applications
For thermally stable LIGA materials for high temperature MEMS applications LIGA Ni-W layers and micro testing samples with different compositions (15 and 5 at W) were electrodeposited. In order to investigate the thermal stability the Ni-W layers were annealed at different temperatures (300-700 degr...
| Main Authors: | , , , , , |
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| Format: | Article |
| Published: |
Springer Verlag (Germany)
2008
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| Subjects: |