Synthesis and annealing of nanostructured TiO2 films by radio-frequency magnetron sputtering
In this investigation, anatase TiO 2 thin films were deposited on glass substrates at room temperature by RF magnetron sputtering at an elevated sputtering pressure of 3 Pa. The TiO 2 films deposited at room temperature were annealed at different temperatures up to 873°K for 1 h. The TiO 2 films we...
| Main Authors: | , , , , |
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| Format: | Article |
| Published: |
Asian Network for Scientific Information
2009
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| Subjects: |