Effect of annealing on the optical and chemical bonding properties of hydrogenated amorphous carbon and hydrogenated amorphous carbon nitride thin films
Hydrogenated amorphous carbon (a-C:H) and hydrogenated amorphous carbon nitride (a-CN(x):H) films were prepared in a custom-built radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD) system with a parallel-plate configuration. Pure methane and a gas mixture of methane and nitrogen we...
| Main Authors: | , , , , |
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| Format: | Article |
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IOP Publishing
2009
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