Effect of rf power on the growth of silicon nanowires by hot-wire assisted plasma enhanced chemical vapor deposition (HW-PECVD) technique
Silicon nanowires (SiNWs) were synthesized by simultaneous evaporation of Au and Si deposition using H(2) diluted SiH(4). The deposition techniques combined hot-wire (HW) and plasma enhanced chemical vapor deposition (PECVD). Au wires were placed on the filament and heated simultaneously with the ac...
| Main Authors: | , , , , , |
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| Format: | Article |
| Published: |
2011
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| Subjects: |