Effects of post-thermal annealing temperature on the optical and structural properties of gold particles on silicon suboxide films
In this work, silicon suboxide (SiOx) thin films were deposited using a RF magnetron sputtering system. A thin layer of gold (Au) with a thickness of about 10 nm was sputtered onto the surface of the deposited SiOx films prior to the thermal annealing process at 400 degrees C, 600 degrees C, 800 deg...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Published: |
2011
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| Subjects: |