Infrared and raman spectroscopy studies on pulsed PECVD a-Si:H Films

Infrared and raman spectroscopy studies on pulsed PECVD a-Si:H Films

This work presents a study on the structural properties of hydrogenated amorphous silicon (a-Si:H) prepared by pulsed plasma enhanced chemical vapour deposition (PECVD) technique using Raman and infrared spectroscopy. The bonded hydrogen content and hydrogen bonding configurations in the a-Si:H film...

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Bibliographic Details
Main Authors:	Boon, T.G., Rahman, A.S.
Format:	Article
Language:	English
Published:	2007
Subjects:	QC Physics
Online Access:	http://eprints.um.edu.my/7362/1/Infrared_and_Raman_Spectroscopy_Studies_on_Pulsed_PECVD_a-SiH_Films.pdf

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