Optical characteristics of hydrogenated amorphous silicon carbide films prepared at various gas flow rate ratios
Hydrogenated amorphous silicon carbide (a-SiC:H) films were prepared using a home-built plasma-enhanced chemical vapor deposition (PECVD) system with different flow rate ratios of methane (CH(4)) and silane (SiH(4)) gases. Fourier-transform infrared (FTIR) spectra indicate multiple bonding configura...
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IOP Publishing
2007
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