Optical characteristics of hydrogenated amorphous silicon carbide films prepared at various gas flow rate ratios

Optical characteristics of hydrogenated amorphous silicon carbide films prepared at various gas flow rate ratios

Hydrogenated amorphous silicon carbide (a-SiC:H) films were prepared using a home-built plasma-enhanced chemical vapor deposition (PECVD) system with different flow rate ratios of methane (CH(4)) and silane (SiH(4)) gases. Fourier-transform infrared (FTIR) spectra indicate multiple bonding configura...

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Bibliographic Details
Main Authors:	Azis, A., Rahman, Saadah Abdul
Format:	Article
Published:	IOP Publishing 2007
Subjects:	QC Physics

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