Pressure dependent structural and optical properties of silicon carbide thin films deposited by hot wire chemical vapor deposition from pure silane and methane gases
Silicon carbide (SiC) thin films were deposited using hot wire chemical vapor deposition technique from silane (SiH 4) and methane (CH 4) gas precursors. The effect of deposition pressure on structural and optical properties of SiC films was investigated. Various spectroscopic methods including Four...
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| Format: | Article |
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Springer
2012
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