Study on the role of filament temperature on growth of indium-catalyzed silicon nanowires by the hot-wire chemical vapor deposition technique

Silicon nanowires (SiNWs) were synthesized from indium catalysts on the Si(111) substrate using the hot-wire chemical vapor deposition technique. A tungsten filament with purity of 99.95 was employed for both the evaporation of an indium wire as catalyst and the decomposition of the precursor gas si...

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Bibliographic Details
Main Authors: Chong, S.K., Goh, B.T., Dee, C.F., Rahman, S.A.
Format: Article
Published: 2012
Subjects: