Langmuir probe measurement in a radio frequency inductively coupled argon plasma
A Langmuir probe diagnostic system is constructed to measure the plasma properties in a radio frequency (RF) inductively coupled Argon plasma. A passive compensation is incorporated into the Langmuir probe to provide the high impedance to the probe tip in the fundamental drive frequency of 13.56 MHz...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2004
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/7712/1/Langmuir_probe_measurement_in_a_radio_frequency_inductively_coupled_argon_plasma.pdf |