Energy distributions of copper ions and atoms sputtered by atomic and molecular ions
Non-resonant multiphoton ionization combined with quadrupole and time-of-flight analysis has been used to study sputtering by both atomic and molecular ion beams. The mass spectra and energy distributions of both sputtered atoms and secondary ions produced by 3.6 keV Ar+, N+, N-2(+), CF2+ and CF3+ i...
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| Format: | Article |
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Institute of Physics
1997
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