Investigation of the geometry modeling of metal organic halide vapor phase epitaxy (MOHVPE) reactor
The new approach for designing a horizontal metal organic halide vapor phase epitaxy(MOHVPE) reactor chamber is proposed. The model is conjugated with comprehensive detailed simulation for horizontal tube reaction chamber by using computerized software. The modeling approach is based on the hybridiz...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Trans Tech Publications, Switzerland
2013
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/9784/1/00011485_87030.pdf |