RF power dependence of ZnO thin film deposited by RF powered Magnetron Sputtering system
This paper investigates the influence of RF power onto structural and optical properties of Zinc Oxide (ZnO) thin films. A series of ZnO thin films was prepared on the glass substrate by RF magnetron sputtering. ZnO is well known for various applications such as varistors, light emitting diode, gas...
| Những tác giả chính: | , , , , , |
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| Định dạng: | Bài viết |
| Ngôn ngữ: | English English |
| Được phát hành: |
2016
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| Những chủ đề: | |
| Truy cập trực tuyến: | https://eprints.ums.edu.my/id/eprint/19133/1/RF%20power%20dependence%20of%20ZnO%20thin%20film%20deposited%20by%20RF%20powered%20Magnetron%20Sputtering%20system.pdf https://eprints.ums.edu.my/id/eprint/19133/7/RF%20Power%20Dependence%20of%20ZnO%20Thin%20Film%20Deposited.pdf |