RF power dependence of ZnO thin film deposited by RF powered Magnetron Sputtering system
This paper investigates the influence of RF power onto structural and optical properties of Zinc Oxide (ZnO) thin films. A series of ZnO thin films was prepared on the glass substrate by RF magnetron sputtering. ZnO is well known for various applications such as varistors, light emitting diode, gas...
| Үндсэн зохиолчид: | , , , , , |
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| Формат: | Өгүүллэг |
| Хэл сонгох: | English English |
| Хэвлэсэн: |
2016
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| Нөхцлүүд: | |
| Онлайн хандалт: | https://eprints.ums.edu.my/id/eprint/19133/1/RF%20power%20dependence%20of%20ZnO%20thin%20film%20deposited%20by%20RF%20powered%20Magnetron%20Sputtering%20system.pdf https://eprints.ums.edu.my/id/eprint/19133/7/RF%20Power%20Dependence%20of%20ZnO%20Thin%20Film%20Deposited.pdf |