Impedance spectroscopy analysis of Al/100-plane AlN/p-Si MIS prepared by HiPIMS method for tailoring dielectric properties
The effects of variation of sputtering pressure of AlN HiPIMS deposition on Si substrate to the structure and electrical properties were investigated through XRD, AFM and impedance spectroscopy method. The strong preferred 100-plane AlN was observed for all samples from XRD pattern. The AlN thin fil...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Inderscience Online
2022
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| Subjects: | |
| Online Access: | https://eprints.ums.edu.my/id/eprint/34351/1/Abstract.pdf |