Fabrication of silicon nanowire sensors for highly sensitive pH and DNA hybridization detection
A highly sensitive silicon nanowire (SiNW)-based sensor device was developed using electron beam lithography integrated with complementary metal oxide semiconductor (CMOS) technology. The top-down fabrication approach enables the rapid fabrication of device miniaturization with uniform and strictly...
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| Format: | Article |
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Multidisciplinary Digital Publishing Institute
2022
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