Fabrication of silicon nanowire sensors for highly sensitive pH and DNA hybridization detection
A highly sensitive silicon nanowire (SiNW)-based sensor device was developed using electron beam lithography integrated with complementary metal oxide semiconductor (CMOS) technology. The top-down fabrication approach enables the rapid fabrication of device miniaturization with uniform and strictly...
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| Format: | Article |
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Multidisciplinary Digital Publishing Institute
2022
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| author | Abd Rahman, Siti Fatimah Yusof, Nor Azah Md Arshad, Mohd Khairuddin Hashim, Uda Md Nor, Mohammad Nuzaihan Hamidon, Mohd Nizar |
| author_facet | Abd Rahman, Siti Fatimah Yusof, Nor Azah Md Arshad, Mohd Khairuddin Hashim, Uda Md Nor, Mohammad Nuzaihan Hamidon, Mohd Nizar |
| author_sort | Abd Rahman, Siti Fatimah |
| collection | UPM |
| description | A highly sensitive silicon nanowire (SiNW)-based sensor device was developed using electron beam lithography integrated with complementary metal oxide semiconductor (CMOS) technology. The top-down fabrication approach enables the rapid fabrication of device miniaturization with uniform and strictly controlled geometric and surface properties. This study demonstrates that SiNW devices are well-aligned with different widths and numbers for pH sensing. The device consists of a single nanowire with 60 nm width, exhibiting an ideal pH responsivity (18.26 × 106 Ω/pH), with a good linear relation between the electrical response and a pH level range of 4–10. The optimized SiNW device is employed to detect specific single-stranded deoxyribonucleic acid (ssDNA) molecules. To use the sensing area, the sensor surface was chemically modified using (3-aminopropyl) triethoxysilane and glutaraldehyde, yielding covalently linked nanowire ssDNA adducts. Detection of hybridized DNA works by detecting the changes in the electrical current of the ssDNA-functionalized SiNW sensor, interacting with the targeted ssDNA in a label-free way. The developed biosensor shows selectivity for the complementary target ssDNA with linear detection ranging from 1.0 × 10−12 M to 1.0 × 10−7 M and an attained detection limit of 4.131 × 10−13 M. This indicates that the use of SiNW devices is a promising approach for the applications of ion detection and biomolecules sensing and could serve as a novel biosensor for future biomedical diagnosis. |
| first_indexed | 2024-03-06T11:15:19Z |
| format | Article |
| id | upm.eprints-101455 |
| institution | Universiti Putra Malaysia |
| last_indexed | 2024-03-06T11:15:19Z |
| publishDate | 2022 |
| publisher | Multidisciplinary Digital Publishing Institute |
| record_format | dspace |
| spelling | upm.eprints-1014552023-06-17T13:14:59Z http://psasir.upm.edu.my/id/eprint/101455/ Fabrication of silicon nanowire sensors for highly sensitive pH and DNA hybridization detection Abd Rahman, Siti Fatimah Yusof, Nor Azah Md Arshad, Mohd Khairuddin Hashim, Uda Md Nor, Mohammad Nuzaihan Hamidon, Mohd Nizar A highly sensitive silicon nanowire (SiNW)-based sensor device was developed using electron beam lithography integrated with complementary metal oxide semiconductor (CMOS) technology. The top-down fabrication approach enables the rapid fabrication of device miniaturization with uniform and strictly controlled geometric and surface properties. This study demonstrates that SiNW devices are well-aligned with different widths and numbers for pH sensing. The device consists of a single nanowire with 60 nm width, exhibiting an ideal pH responsivity (18.26 × 106 Ω/pH), with a good linear relation between the electrical response and a pH level range of 4–10. The optimized SiNW device is employed to detect specific single-stranded deoxyribonucleic acid (ssDNA) molecules. To use the sensing area, the sensor surface was chemically modified using (3-aminopropyl) triethoxysilane and glutaraldehyde, yielding covalently linked nanowire ssDNA adducts. Detection of hybridized DNA works by detecting the changes in the electrical current of the ssDNA-functionalized SiNW sensor, interacting with the targeted ssDNA in a label-free way. The developed biosensor shows selectivity for the complementary target ssDNA with linear detection ranging from 1.0 × 10−12 M to 1.0 × 10−7 M and an attained detection limit of 4.131 × 10−13 M. This indicates that the use of SiNW devices is a promising approach for the applications of ion detection and biomolecules sensing and could serve as a novel biosensor for future biomedical diagnosis. Multidisciplinary Digital Publishing Institute 2022-08-02 Article PeerReviewed Abd Rahman, Siti Fatimah and Yusof, Nor Azah and Md Arshad, Mohd Khairuddin and Hashim, Uda and Md Nor, Mohammad Nuzaihan and Hamidon, Mohd Nizar (2022) Fabrication of silicon nanowire sensors for highly sensitive pH and DNA hybridization detection. Nanomaterials, 12 (15). art. no. 2652. pp. 1-17. ISSN 2079-4991 https://www.mdpi.com/2079-4991/12/15/2652 10.3390/nano12152652 |
| spellingShingle | Abd Rahman, Siti Fatimah Yusof, Nor Azah Md Arshad, Mohd Khairuddin Hashim, Uda Md Nor, Mohammad Nuzaihan Hamidon, Mohd Nizar Fabrication of silicon nanowire sensors for highly sensitive pH and DNA hybridization detection |
| title | Fabrication of silicon nanowire sensors for highly sensitive pH and DNA hybridization detection |
| title_full | Fabrication of silicon nanowire sensors for highly sensitive pH and DNA hybridization detection |
| title_fullStr | Fabrication of silicon nanowire sensors for highly sensitive pH and DNA hybridization detection |
| title_full_unstemmed | Fabrication of silicon nanowire sensors for highly sensitive pH and DNA hybridization detection |
| title_short | Fabrication of silicon nanowire sensors for highly sensitive pH and DNA hybridization detection |
| title_sort | fabrication of silicon nanowire sensors for highly sensitive ph and dna hybridization detection |
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